JPS6329420B2 - - Google Patents

Info

Publication number
JPS6329420B2
JPS6329420B2 JP58068549A JP6854983A JPS6329420B2 JP S6329420 B2 JPS6329420 B2 JP S6329420B2 JP 58068549 A JP58068549 A JP 58068549A JP 6854983 A JP6854983 A JP 6854983A JP S6329420 B2 JPS6329420 B2 JP S6329420B2
Authority
JP
Japan
Prior art keywords
layer
region
semiconductor layer
forming
become
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58068549A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59194476A (ja
Inventor
Yasuro Mitsui
Kazuo Nishitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP58068549A priority Critical patent/JPS59194476A/ja
Publication of JPS59194476A publication Critical patent/JPS59194476A/ja
Publication of JPS6329420B2 publication Critical patent/JPS6329420B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/80FETs having rectifying junction gate electrodes
    • H10D30/87FETs having Schottky gate electrodes, e.g. metal-semiconductor FETs [MESFET]

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP58068549A 1983-04-18 1983-04-18 半導体装置の製造方法 Granted JPS59194476A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58068549A JPS59194476A (ja) 1983-04-18 1983-04-18 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58068549A JPS59194476A (ja) 1983-04-18 1983-04-18 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59194476A JPS59194476A (ja) 1984-11-05
JPS6329420B2 true JPS6329420B2 (en]) 1988-06-14

Family

ID=13376945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58068549A Granted JPS59194476A (ja) 1983-04-18 1983-04-18 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59194476A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04264445A (ja) * 1991-02-19 1992-09-21 Brother Ind Ltd 画像形成装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0824132B2 (ja) * 1985-10-18 1996-03-06 株式会社日立製作所 電界効果トランジスタの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04264445A (ja) * 1991-02-19 1992-09-21 Brother Ind Ltd 画像形成装置

Also Published As

Publication number Publication date
JPS59194476A (ja) 1984-11-05

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